Problem drytek2 SNF 2008-07-30 19:19:43: RF Matching network

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 30 19:19:43 PDT 2008


The tuning capacitor and coil are near the end their ranges.  Had a difficult time tuning an O2 plasma.  Had to set the capacitor at full CW and the coil at full CCW.  The other gas were a little easier (cap at ~50%).  




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