Problem drytek2 SNF 2008-07-31 10:06:06: etch rate low on 3rd electrode down from top

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Jul 31 10:06:06 PDT 2008


I was stripping 1500A of poly and all wafers on other electodes cleared at 2 min 30 sec, but the wafer on electrode #3, did not clear even after 4 min.  There  was still visible poly on the surface. It cleared quickly when transferred to the electrode #2.




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