Comment drytek2 SNF 2008-07-31 10:21:23: 4500A poly, not 1500A in above write up.

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Jul 31 10:21:25 PDT 2008


The etch rate is normal except for electrode #3.  I just want to clarify.  1500A poly clears at around 50 seconds, which is normal for my process.




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