Comment drytek2 SNF 2008-07-31 10:21:23: 4500A poly, not 1500A in above write up.
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Thu Jul 31 10:21:25 PDT 2008
The etch rate is normal except for electrode #3. I just want to clarify. 1500A poly clears at around 50 seconds, which is normal for my process.
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