Problem drytek2 SNF 2008-03-10 12:40:08: system not pumping down to gas on set point

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Mar 10 12:40:09 PDT 2008


System only pumps down to 17mT. I think the gas on set point is 14mT.  Can't etch my wafers.




More information about the drytek2-pcs mailing list