Comment drytek2 SNF 2008-03-10 18:18:52: Base pressure slow to reach

king at snf.stanford.edu king at snf.stanford.edu
Mon Mar 10 18:18:52 PDT 2008


Maybe the pumpdown trip point could be bumped up to 20mT or so from 15mT.  It's hanging up at around 16 or 17mT, taking a long time to start flowing gases.  (maybe there's a leak, but not a big one. wafers are not the source.).  Thanks in advance.




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