From nharjee at snf.stanford.edu Tue Nov 4 13:53:03 2008 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 4 Nov 2008 13:53:03 -0800 Subject: Comment drytek2 SNF 2008-11-04 13:53:02: Any update on RF power? Message-ID: Still doesn't go above ~325 W for Process 3 (nitride). Please let us know. Thanks. From ahazeghi at snf.stanford.edu Tue Nov 4 22:06:00 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Tue, 4 Nov 2008 22:06:00 -0800 Subject: Comment drytek2 SNF 2008-11-04 22:06:00: RF power Message-ID: I was able to get 425W for process 2 by setting the RF level tomax, however min reflected power was 20W, etch rate TBD, I recommend tool remain under yellow light. From mcvittie at snf.stanford.edu Fri Nov 7 16:41:24 2008 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 7 Nov 2008 16:41:24 -0800 Subject: Shutdown drytek2 SNF 2008-11-07 16:41:23: Pressure Gauge on drytek2 is out Message-ID: When I went to check out the max power problem, I found that tt there is no pressure readout. I checked the connections to the gauge. The +/- 15V inputs are ok. The pressure signal stays at 12 V whether the system is under vacuum or at atmospheric pressure. The pressure readout goes to 3 T when the gauge is disconnected. Regarding the max power problem, the manual says there is a max power limit pot (R2) on a small pcb on the back of the supply. I was going check this pot when I found the vac readout problem. Jim From mcvittie at snf.stanford.edu Fri Nov 7 18:25:23 2008 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 7 Nov 2008 18:25:23 -0800 Subject: Comment drytek2 SNF 2008-11-07 18:25:22: Problem is Readout Not Gauge Message-ID: Hi, I tried an on old MKS baratron in place of the current bartron. It has the same problem so it looks like the problem is the MKS PDR-C-1B readout unit. jim From mcvittie at snf.stanford.edu Sun Nov 9 14:46:08 2008 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 9 Nov 2008 14:46:08 -0800 Subject: Comment drytek2 SNF 2008-11-07 18:25:22: Problem is Readout Not Gauge Message-ID: The problem was my fault, I turned off the pump where working on the rf supply. The gauge has a builtin set point and rely, which inhibits the readout if the vacuum is not low enough. The gauge is working but I question the readout. When the gauge reads 150 mT, the pressure voltage from the gauge is only 103 mV. It should be 150 mT. From mcvittie at snf.stanford.edu Sun Nov 9 14:48:02 2008 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 9 Nov 2008 14:48:02 -0800 Subject: Shutdown drytek2 SNF 2008-11-07 16:41:23: Pressure Gauge on drytek2 is out Message-ID: See previous comment. The gauge problem was caused by me working on the rf supply. I did check the power limit pot on the rf supply. It had no effect on the max power out. Jim From eenriquez at snf.stanford.edu Tue Nov 11 08:52:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Nov 2008 08:52:16 -0800 Subject: Shutdown drytek2 SNF 2008-11-11 08:52:15: RF generator Message-ID: From eenriquez at snf.stanford.edu Tue Nov 11 14:25:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Nov 2008 14:25:58 -0800 Subject: Comment drytek2 SNF 2008-11-11 14:25:57: Update Message-ID: Need to reinstall the RF generator. From eenriquez at snf.stanford.edu Wed Nov 12 08:48:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 08:48:28 -0800 Subject: Shutdown drytek2 SNF 2008-11-11 08:52:15: RF generator Message-ID: Reinstalled RF generator. Power is still low with a maximum of 450W. Ran for 10 minutes with no other problems. From eenriquez at snf.stanford.edu Wed Nov 12 08:48:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 08:48:38 -0800 Subject: Comment drytek2 SNF 2008-11-11 14:25:57: Update Message-ID: Reinstalled RF generator. Power is still low with a maximum of 450W. Ran for 10 minutes with no other problems. From filip at snf.stanford.edu Thu Nov 13 02:36:24 2008 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 13 Nov 2008 02:36:24 -0800 Subject: Comment drytek2 SNF 2008-11-13 02:36:23: RF power max at 375W with 0 reflected Message-ID: process 2. From king at snf.stanford.edu Tue Nov 18 20:55:31 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 18 Nov 2008 20:55:31 -0800 Subject: Comment drytek2 SNF 2008-11-18 20:55:31: Process 2 power drifts Message-ID: For the SF2/F22 poly etch process, It started out at 400W but drifted steadily down to 350 or 325W over a minute. Could tune and hold at "0"W. Chamber had been seasoned for 15 minutes. From king at snf.stanford.edu Thu Nov 20 15:16:21 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 20 Nov 2008 15:16:21 -0800 Subject: Comment drytek2 SNF 2008-11-20 15:16:21: Process 1 power also drifting down Message-ID: Is this real or a measurement artifact as suggested? Could staff please do some etch rate tests to verify and let us know? (we use very short etches). Thanks. From ofidaner at snf.stanford.edu Sun Nov 23 16:58:54 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sun, 23 Nov 2008 16:58:54 -0800 Subject: Problem drytek2 SNF 2008-11-23 16:58:54: plasma does not strike Message-ID: I wanted to do a descum using process 1. The plasma does not stay on for more than 5 seconds. I tried the same configuration in process 2 also. Still the same. From ktorashima at snf.stanford.edu Wed Nov 26 02:49:21 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Wed, 26 Nov 2008 02:49:21 -0800 Subject: Problem drytek2 SNF 2008-11-26 02:49:21: Reflected Power ~200W for O2 clean (Descum) Message-ID: For O2 clean, unable to get reflected power below 200W when forward power is 500W