Comment drytek2 SNF 2008-11-04 22:06:00: RF power

ahazeghi at snf.stanford.edu ahazeghi at snf.stanford.edu
Tue Nov 4 22:06:00 PST 2008


I was able to get 425W for process 2 by setting the RF level tomax,  however min reflected power was 20W, etch rate TBD, I recommend tool remain under yellow light. 




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