Comment drytek2 SNF 2008-11-18 20:55:31: Process 2 power drifts

king at snf.stanford.edu king at snf.stanford.edu
Tue Nov 18 20:55:31 PST 2008


For the SF2/F22 poly etch process, It started out at 400W but drifted steadily down to 350 or 325W over  a minute.   Could tune and hold at "0"W.  Chamber had been seasoned for 15 minutes. 




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