Comment drytek2 SNF 2008-11-20 15:16:21: Process 1 power also drifting down
king at snf.stanford.edu
king at snf.stanford.edu
Thu Nov 20 15:16:21 PST 2008
Is this real or a measurement artifact as suggested? Could staff please do some etch rate tests to verify and let us know? (we use very short etches). Thanks.
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