Comment drytek2 SNF 2008-11-20 15:16:21: Process 1 power also drifting down

king at snf.stanford.edu king at snf.stanford.edu
Thu Nov 20 15:16:21 PST 2008


Is this real or a measurement artifact as suggested?  Could staff please do some etch rate tests to verify and let us know?  (we use very short etches).  Thanks.




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