From lindaw at snf.stanford.edu Fri Oct 17 13:23:17 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 17 Oct 2008 13:23:17 -0700 Subject: Problem drytek2 SNF 2008-10-17 13:23:16: process 2 forward power drifting Message-ID: I was running poly program in process 2, and the forward power kept drifting lower during the course of my 2 minute runs. I was able to keep adjusting it back up to 400 watts, but by my 4th 2 minute run, I couldn't get the forward power above 350. I didn't make any changes to the cap or coil during these 4 2 minute runs. Something is not stable. From mcherry at snf.stanford.edu Tue Oct 21 11:21:42 2008 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Tue, 21 Oct 2008 11:21:42 -0700 Subject: Problem drytek2 SNF 2008-10-21 11:21:41: RF LED Burned Out Message-ID: LED seems to be burned out. From mleone at snf.stanford.edu Wed Oct 22 09:39:33 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Wed, 22 Oct 2008 09:39:33 -0700 Subject: Comment drytek2 SNF 2008-10-22 09:39:32: RF power is low Message-ID: running descum and power cant seem to go any higher than 450W From lindaw at snf.stanford.edu Wed Oct 22 11:49:12 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 22 Oct 2008 11:49:12 -0700 Subject: Problem drytek2 SNF 2008-10-22 11:49:11: RF power is very low Message-ID: process 1 o2 descum max power 475W. Process 2 poly etch max power ~250W as read on the bird meter. From mcherry at snf.stanford.edu Wed Oct 22 12:41:59 2008 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Wed, 22 Oct 2008 12:41:59 -0700 Subject: Problem drytek2 SNF 2008-10-22 12:41:58: More RF info Message-ID: Prc. 3 (set up for nitride etch) max power at 275W. From eenriquez at snf.stanford.edu Wed Oct 22 18:05:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 18:05:25 -0700 Subject: Comment drytek2 SNF 2008-10-22 18:05:24: Update Low rf power Message-ID: RF generator is defective. It is only putting out a max power of 500 W (should be 1000 W) when connected to a dummy load. Need to replace several power transistor. We do not have an ETA on the parts. It should be OK to run the tool if your process's power requirement is within the range of the rf generator output. From latta at snf.stanford.edu Thu Oct 23 09:35:07 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 23 Oct 2008 09:35:07 -0700 Subject: Problem drytek2 SNF 2008-10-22 12:41:58: More RF info Message-ID: see update From latta at snf.stanford.edu Thu Oct 23 09:35:41 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 23 Oct 2008 09:35:41 -0700 Subject: Comment drytek2 SNF 2008-10-22 09:39:32: RF power is low Message-ID: see update From latta at snf.stanford.edu Thu Oct 23 09:35:58 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 23 Oct 2008 09:35:58 -0700 Subject: Problem drytek2 SNF 2008-10-17 13:23:16: process 2 forward power drifting Message-ID: see update From eenriquez at snf.stanford.edu Thu Oct 23 09:54:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Oct 2008 09:54:22 -0700 Subject: Comment drytek2 SNF 2008-10-23 09:54:22: Update rf power Message-ID: The new transistors should arrive tomorrow. The plan is to take the system down next week from 7 am Monday - 6 pm Wed. From eenriquez at snf.stanford.edu Mon Oct 27 08:49:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Oct 2008 08:49:27 -0700 Subject: Shutdown drytek2 SNF 2008-10-27 08:49:26: RF gen repair Message-ID: From eenriquez at snf.stanford.edu Wed Oct 29 17:59:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 17:59:11 -0700 Subject: Shutdown drytek2 SNF 2008-10-27 08:49:26: RF gen repair Message-ID: Replaced power transistors in the RF generator but the power output is still low at around 500 Watts. Next step is to replace a couple of capacitors. The parts should be here by Friday. OK to run the system. From eenriquez at snf.stanford.edu Wed Oct 29 17:59:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 17:59:33 -0700 Subject: Comment drytek2 SNF 2008-10-23 09:54:22: Update rf power Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 29 18:01:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 18:01:18 -0700 Subject: Comment drytek2 SNF 2008-10-22 18:05:24: Update Low rf power Message-ID: Replaced power transistors in the RF generator but output is still low at around 500 W. From eenriquez at snf.stanford.edu Wed Oct 29 18:02:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Oct 2008 18:02:56 -0700 Subject: Comment drytek2 SNF 2008-10-29 18:02:56: Update low RF power Message-ID: We plan to replace a couple of capacitors. Parts should be here by Friday. It should be OK to run the tool if your process's power requirement is within the range of the rf generator output. From latta at snf.stanford.edu Thu Oct 30 11:09:31 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 30 Oct 2008 11:09:31 -0700 Subject: Problem drytek2 SNF 2008-10-30 11:09:30: RF max'd at 450 Message-ID: I was running O2 which started at 525W forward and 40 reverse but during tuning I could not get the forward to more than 425W. Reverse stayed at 40W..... From eenriquez at snf.stanford.edu Thu Oct 30 13:50:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Oct 2008 13:50:11 -0700 Subject: Comment drytek2 SNF 2008-10-30 13:50:10: Update low RF power Message-ID: Replaced filter capacitors. RF power is still low at around 500 W. From king at snf.stanford.edu Thu Oct 30 23:09:19 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 30 Oct 2008 23:09:19 -0700 Subject: Comment drytek2 SNF 2008-10-30 23:09:18: Max RF is about 350W Message-ID: This was process #3. The others didn't tune as well or go that high in power. Also the RF adjust knobs seem to be dragging. I wonder if people are trying to turn them while they're locked.