Problem drytek2 SNF 2008-10-22 11:49:11: RF power is very low

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Oct 22 11:49:12 PDT 2008


process 1 o2 descum max power 475W.  Process 2 poly etch max power ~250W as read on the bird meter.




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