Comment drytek2 SNF 2008-10-22 18:05:24: Update Low rf power

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 22 18:05:25 PDT 2008


 RF generator is defective.  It is only putting out a max power of 500 W  (should be 1000 W) when connected to a dummy load.  Need to replace several power transistor.  We do not have an ETA on the parts.
It should be OK to run the tool if your process's power requirement is within the range of the rf generator output.




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