Comment drytek2 SNF 2008-10-29 18:02:56: Update low RF power

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 29 18:02:56 PDT 2008


We plan to replace a couple of capacitors.   Parts should be here by Friday.
It should be OK to run the tool if your process's power requirement is within the range of the rf generator output.




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