From latta at snf.stanford.edu  Fri Apr  3 11:57:41 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Apr 2009 11:57:41 -0700
Subject: Problem drytek2 SNF 2009-04-03 11:57:40: Pink plasma!
Message-ID: <mailman.1151.1357938292.25682.drytek2-pcs@snf.stanford.edu>

While running a nitride test run (SF6=100, O2=10) the plasma was pink.
Usaully it is a lovely blue....
  Everything appeared ok, pressure, gas flows, pwr 500/15ref.  Possible tiny leak?



From cbaxter at snf.stanford.edu  Fri Apr  3 17:53:14 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 3 Apr 2009 17:53:14 -0700
Subject: Problem drytek2 SNF 2009-04-03 11:57:40: Pink plasma!
Message-ID: <mailman.1152.1357938292.25682.drytek2-pcs@snf.stanford.edu>




From bdai at snf.stanford.edu  Sun Apr  5 00:23:38 2009
From: bdai at snf.stanford.edu (bdai at snf.stanford.edu)
Date: Sun, 5 Apr 2009 00:23:38 -0700
Subject: Comment drytek2 SNF 2009-04-05 00:23:37: Nitride etch
Message-ID: <mailman.1153.1357938292.25682.drytek2-pcs@snf.stanford.edu>

Low stress nitride etched with standard Nitride Etch recipe. Plasma color is pink. Etch rate is ~800A/min.