Problem drytek2 SNF 2009-04-03 11:57:40: Pink plasma!

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Apr 3 11:57:41 PDT 2009


While running a nitride test run (SF6=100, O2=10) the plasma was pink.
Usaully it is a lovely blue....
  Everything appeared ok, pressure, gas flows, pwr 500/15ref.  Possible tiny leak?




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