Comment drytek2 SNF 2009-04-05 00:23:37: Nitride etch

bdai at snf.stanford.edu bdai at snf.stanford.edu
Sun Apr 5 00:23:38 PDT 2009


Low stress nitride etched with standard Nitride Etch recipe. Plasma color is pink. Etch rate is ~800A/min.




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