From lindaw at snf.stanford.edu Wed Aug 12 13:12:46 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 12 Aug 2009 13:12:46 -0700 Subject: Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate Message-ID: The third platen from the top still has a much lower etch rate than the other 5 platens. From lindaw at snf.stanford.edu Wed Aug 12 13:51:18 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 12 Aug 2009 13:51:18 -0700 Subject: Problem drytek2 SNF 2009-08-12 13:51:17: chamber doesn't auto vent after process Message-ID: chamber not autoventing after process over. I was using process 2 poly etch. From xzhuan1 at snf.stanford.edu Wed Aug 12 15:43:55 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 12 Aug 2009 15:43:55 -0700 Subject: Problem drytek2 SNF 2009-08-12 15:43:54: etch does not always start Message-ID: I'm using prog1 descum. From tura at snf.stanford.edu Thu Aug 13 12:31:20 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 13 Aug 2009 12:31:20 -0700 Subject: Shutdown drytek2 SNF 2009-08-13 12:31:19: It does not start flowing the gases Message-ID: It doesn't vent when standby button is pressed. I can get it to vent using micro rest, but when I start a process, it pumps down and stops there, doesn't turn on the gases. I tried process 1,2, 3 with the same result. I just can't make it turn on gases and start plasma. Maybe it is in some type of manual mode and needs an input before going to the next step? I need to strip photoresist, I hope either drytek2 or gasonics will come up very soon! From king at snf.stanford.edu Thu Aug 13 15:56:31 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 13 Aug 2009 15:56:31 -0700 Subject: Comment drytek2 SNF 2009-08-13 15:56:31: pumpdown trick Message-ID: It did it to me too but the problem went away on its own. For tonight maybe the pump setpoint could be bumped up. Otherwise it's easy to get the machine to continue, so if it's not fixed or adjusted before staff goes home I could help people (would have to be yellow lighted from red). From shott at snf.stanford.edu Thu Aug 13 16:29:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 13 Aug 2009 16:29:16 -0700 Subject: Shutdown drytek2 SNF 2009-08-13 12:31:19: It does not start flowing the gases Message-ID: Clearing temporarily because Robin King says she knows how to get around this and will help anyone who needs to use the machine this evening. Careful reporting of things like pressures it reaches or where in the cycle it stops is helpful in allowing us to sort out problems. Thanks, John From cbaxter at snf.stanford.edu Thu Aug 13 20:27:27 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Aug 2009 20:27:27 -0700 Subject: Problem drytek2 SNF 2009-08-12 13:51:17: chamber doesn't auto vent after process Message-ID: From cbaxter at snf.stanford.edu Thu Aug 13 20:27:41 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Aug 2009 20:27:41 -0700 Subject: Problem drytek2 SNF 2009-08-12 15:43:54: etch does not always start Message-ID: From cbaxter at snf.stanford.edu Thu Aug 13 20:28:11 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Aug 2009 20:28:11 -0700 Subject: Comment drytek2 SNF 2009-08-13 15:56:31: pumpdown trick Message-ID: Added fomlin oil blower. From king at snf.stanford.edu Thu Aug 13 22:29:47 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 13 Aug 2009 22:29:47 -0700 Subject: Comment drytek2 SNF 2009-08-13 22:29:47: pumpdown worked Message-ID: Had no problems, thanks for adding the fomblin. Pumpdown setpoint seems to be at 30mt now. From rik at snf.stanford.edu Fri Aug 14 10:01:29 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 14 Aug 2009 10:01:29 -0700 Subject: Problem drytek2 SNF 2009-08-14 10:01:28: Recipe is not starting Message-ID: Stuck at pumpdown again From gth at snf.stanford.edu Sun Aug 16 17:25:19 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 16 Aug 2009 17:25:19 -0700 Subject: Shutdown drytek2 SNF 2009-08-16 17:25:19: Leak or bad pump Message-ID: System will not pump to the new crossover pressure. As I remember, the crossover pressure was 20 mT. That was increased to 24 mT, as per the previous message in coral. Now, the system pumps to barely 40 mT and won't cross over at all. Also, the door is messed up and loose. From eenriquez at snf.stanford.edu Mon Aug 17 14:54:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Aug 2009 14:54:57 -0700 Subject: Comment drytek2 SNF 2009-08-17 14:54:57: Installing a new vac pump Message-ID: Replaced the vacuum pump. Need to finish installing the new pump. From eenriquez at snf.stanford.edu Tue Aug 18 14:39:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Aug 2009 14:39:15 -0700 Subject: Shutdown drytek2 SNF 2009-08-16 17:25:19: Leak or bad pump Message-ID: Installed new pump. Cycled process many times without a problem. Ran a 30 min O2 plasma. From eenriquez at snf.stanford.edu Tue Aug 18 14:39:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Aug 2009 14:39:48 -0700 Subject: Comment drytek2 SNF 2009-08-17 14:54:57: Installing a new vac pump Message-ID: Archived From eenriquez at snf.stanford.edu Tue Aug 18 14:40:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Aug 2009 14:40:16 -0700 Subject: Problem drytek2 SNF 2009-08-14 10:01:28: Recipe is not starting Message-ID: Installed new vacuum pump. From gth at snf.stanford.edu Tue Aug 18 15:29:31 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 18 Aug 2009 15:29:31 -0700 Subject: Comment drytek2 SNF 2009-08-18 15:29:31: Descum works fine. Message-ID: Thanks Elmer for getting the new pump. i appreciate your help. The descum works great. Very low relected power. From lindaw at snf.stanford.edu Thu Aug 20 09:04:04 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 20 Aug 2009 09:04:04 -0700 Subject: Shutdown drytek2 SNF 2009-08-20 09:04:03: no program will run Message-ID: pumps down to about 87 mT, then backfills to 350, as if it is stuck in standby mode. From eenriquez at snf.stanford.edu Thu Aug 20 15:20:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 Aug 2009 15:20:35 -0700 Subject: Shutdown drytek2 SNF 2009-08-20 09:04:03: no program will run Message-ID: The system was remaining in the standby pressure. Found the 1st pressure set point had been changed. Readjusted the set point and cycled the process many time to ensure that the process started at the correct pressure. Please do not touch the pressure controller. From chienyuc at snf.stanford.edu Thu Aug 20 20:54:18 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 20 Aug 2009 20:54:18 -0700 Subject: Problem drytek2 SNF 2009-08-20 20:54:17: Cannot pump down Message-ID: Same issues as previously reported: lowest pressure recorded ~29mtorr. Then the pressure was around 30-39 mtorr Manually bypass the base pressure check and continued processing. From rik at snf.stanford.edu Fri Aug 21 10:17:11 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 21 Aug 2009 10:17:11 -0700 Subject: Comment drytek2 SNF 2009-08-21 10:17:10: Process 2 worked Message-ID: Pumped without any problems. Ran 2 etches. Seems to be an intermittent problem. From rik at snf.stanford.edu Fri Aug 21 18:20:49 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 21 Aug 2009 18:20:49 -0700 Subject: Problem drytek2 SNF 2009-08-21 18:20:49: Pressure acting up again Message-ID: Pressure only goes down to 80 and then rises to 280-340 range where it holds. Tried Process 1 & 2 a number of times. From bchui at snf.stanford.edu Fri Aug 21 20:53:15 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 21 Aug 2009 20:53:15 -0700 Subject: Problem drytek2 SNF 2009-08-21 20:53:15: Couldn't pump down Message-ID: Lowest it would go was 70mT. Process wouldn't start. From ericp at snf.stanford.edu Fri Aug 21 22:09:38 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 21 Aug 2009 22:09:38 -0700 Subject: Shutdown drytek2 SNF 2009-08-21 22:09:37: same problem Message-ID: System does not pump down even if the green standby light is off. Last problem (which has been present for over a month) has not been resolved. From cbaxter at snf.stanford.edu Sun Aug 23 10:22:39 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 10:22:39 -0700 Subject: Shutdown drytek2 SNF 2009-08-21 22:09:37: same problem Message-ID: Hooked up the leak detector and no vacuum leak found. What I found was the purge nupro valve tip is leaking by, changed nupro valve tip and I cycled the tool multiful times w/out problem. From cbaxter at snf.stanford.edu Sun Aug 23 10:22:44 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 10:22:44 -0700 Subject: Problem drytek2 SNF 2009-08-21 20:53:15: Couldn't pump down Message-ID: From cbaxter at snf.stanford.edu Sun Aug 23 10:23:11 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 10:23:11 -0700 Subject: Problem drytek2 SNF 2009-08-21 18:20:49: Pressure acting up again Message-ID: From cbaxter at snf.stanford.edu Sun Aug 23 10:23:47 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Aug 2009 10:23:47 -0700 Subject: Problem drytek2 SNF 2009-08-20 20:54:17: Cannot pump down Message-ID: From cbaxter at snf.stanford.edu Wed Aug 26 18:10:06 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:10:06 -0700 Subject: Comment drytek2 SNF 2009-08-21 10:17:10: Process 2 worked Message-ID: From cbaxter at snf.stanford.edu Wed Aug 26 19:05:37 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 26 Aug 2009 19:05:37 -0700 Subject: Comment drytek2 SNF 2009-08-13 22:29:47: pumpdown worked Message-ID: From shott at snf.stanford.edu Fri Aug 28 11:20:20 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 28 Aug 2009 11:20:20 -0700 Subject: Comment drytek2 SNF 2009-08-28 11:20:19: Machine cleared following shutdown ... Message-ID: We've restarted the machine and run a test of the Oxygen recipe to confirmm that the machine is operational. drytek2 is ready for use. John