Shutdown drytek2 SNF 2009-08-16 17:25:19: Leak or bad pump

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 18 14:39:15 PDT 2009

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Installed new pump.  Cycled process many times without a problem.  Ran a 30 min O2 plasma.

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