August 2009 Archives by subject

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Starting: Wed Aug 12 13:12:46 PDT 2009
Ending: Fri Aug 28 11:20:20 PDT 2009
Messages: 31

• Comment drytek2 SNF 2009-08-13 15:56:31: pumpdown trick   king at snf.stanford.edu
• Comment drytek2 SNF 2009-08-13 15:56:31: pumpdown trick   cbaxter at snf.stanford.edu
• Comment drytek2 SNF 2009-08-13 22:29:47: pumpdown worked   king at snf.stanford.edu
• Comment drytek2 SNF 2009-08-13 22:29:47: pumpdown worked   cbaxter at snf.stanford.edu
• Comment drytek2 SNF 2009-08-17 14:54:57: Installing a new vac pump   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-08-17 14:54:57: Installing a new vac pump   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-08-18 15:29:31: Descum works fine.   gth at snf.stanford.edu
• Comment drytek2 SNF 2009-08-21 10:17:10: Process 2 worked   rik at snf.stanford.edu
• Comment drytek2 SNF 2009-08-21 10:17:10: Process 2 worked   cbaxter at snf.stanford.edu
• Comment drytek2 SNF 2009-08-28 11:20:19: Machine cleared following shutdown ...   shott at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 13:12:45: third platen from top still has slower etch rate   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 13:51:17: chamber doesn't auto vent after process   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 13:51:17: chamber doesn't auto vent after process   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 15:43:54: etch does not always start   xzhuan1 at snf.stanford.edu
• Problem drytek2 SNF 2009-08-12 15:43:54: etch does not always start   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-08-14 10:01:28: Recipe is not starting   rik at snf.stanford.edu
• Problem drytek2 SNF 2009-08-14 10:01:28: Recipe is not starting   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2009-08-20 20:54:17: Cannot pump down   chienyuc at snf.stanford.edu
• Problem drytek2 SNF 2009-08-20 20:54:17: Cannot pump down   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-08-21 18:20:49: Pressure acting up again   rik at snf.stanford.edu
• Problem drytek2 SNF 2009-08-21 18:20:49: Pressure acting up again   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-08-21 20:53:15: Couldn't pump down   bchui at snf.stanford.edu
• Problem drytek2 SNF 2009-08-21 20:53:15: Couldn't pump down   cbaxter at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-13 12:31:19: It does not start flowing the gases   tura at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-13 12:31:19: It does not start flowing the gases   shott at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-16 17:25:19: Leak or bad pump   gth at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-16 17:25:19: Leak or bad pump   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-20 09:04:03: no program will run   lindaw at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-20 09:04:03: no program will run   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-21 22:09:37: same problem   ericp at snf.stanford.edu
• Shutdown drytek2 SNF 2009-08-21 22:09:37: same problem   cbaxter at snf.stanford.edu

Last message date: Fri Aug 28 11:20:20 PDT 2009
Archived on: Fri Jan 11 13:05:12 PST 2013

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