Problem drytek2 SNF 2009-02-04 21:53:27: Process 3 Power Problem

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Wed Feb 4 21:53:28 PST 2009


Tool is still having serious problems tuning properly.  In the best case, started out with Fwd:Ref = 475:80, which then quickly reduced to 400:40.  By word of mouth, other people are still having problems with Process 1 too.  Power is very unstable, with the plasma cutting off entirely for even very small changes in COIL/CAP.




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