Problem drytek2 SNF 2009-01-08 12:21:58: RF drifting

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jan 8 12:21:58 PST 2009


I ran Process 2 (poly etch, 400W) for 10 mins.  At about 3 mins the RF drifted to 375.  By continuing to crank up on FR Level pot I kept it at 375W .
Additional 2 min etches drifted a bit also, but I was able to keep them at 400W by monitoring the power.




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