Problem drytek2 SNF 2009-01-22 16:14:22: proc. 2 poly max power 300W min refl. 80W

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Jan 22 16:14:22 PST 2009


Can't tune process 2 poly etch to better than 300 W forward with 80 W reflected.  Earlier today I was able to get 375-350 W forward with 40 reflected. used same settings, and now can't get anywhere near that. 




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