January 2009 Archives by subject

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Starting: Wed Jan 7 18:34:01 PST 2009
Ending: Fri Jan 23 10:29:28 PST 2009
Messages: 30

• Comment drytek2 SNF 2008-10-29 18:02:56: Update low RF power   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-10-30 13:50:10: Update low RF power   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-10-30 23:09:18: Max RF is about 350W   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-11-04 13:53:02: Any update on RF power?   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-11-04 22:06:00: RF power   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-11-13 02:36:23: RF power max at 375W with 0 reflected   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-11-18 20:55:31: Process 2 power drifts   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-11-20 15:16:21: Process 1 power also drifting down   shott at snf.stanford.edu
• Comment drytek2 SNF 2008-12-04 08:32:05: Update high reflected power   latta at snf.stanford.edu
• Comment drytek2 SNF 2008-12-06 11:16:03: Process 2 RF level knob has little if any effect   latta at snf.stanford.edu
• Comment drytek2 SNF 2008-12-06 21:54:13: RF Problems ....   shott at snf.stanford.edu
• Comment drytek2 SNF 2009-01-09 11:06:13: Process Qual after RF repair   latta at snf.stanford.edu
• Comment drytek2 SNF 2009-01-23 10:29:28: Process2 poly etch   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2008-10-21 11:21:41: RF LED Burned Out   shott at snf.stanford.edu
• Problem drytek2 SNF 2008-10-22 11:49:11: RF power is very low   shott at snf.stanford.edu
• Problem drytek2 SNF 2008-10-30 11:09:30: RF max'd at 450   shott at snf.stanford.edu
• Problem drytek2 SNF 2008-11-23 16:58:54: plasma does not strike   shott at snf.stanford.edu
• Problem drytek2 SNF 2008-11-26 02:49:21: Reflected Power ~200W for O2 clean (Descum)   latta at snf.stanford.edu
• Problem drytek2 SNF 2008-12-03 22:19:00: high reflection power and no forward power   latta at snf.stanford.edu
• Problem drytek2 SNF 2008-12-05 14:38:59: power inconsistent!   shott at snf.stanford.edu
• Problem drytek2 SNF 2009-01-08 12:21:58: RF drifting   latta at snf.stanford.edu
• Problem drytek2 SNF 2009-01-13 11:29:45: RF Power still drifting   yeh at snf.stanford.edu
• Problem drytek2 SNF 2009-01-14 12:29:12: power & tuning unstable process 1&2   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-01-15 11:59:37: RF level knob   yeh at snf.stanford.edu
• Problem drytek2 SNF 2009-01-20 08:50:23: RF power still drifting   yeh at snf.stanford.edu
• Problem drytek2 SNF 2009-01-22 16:14:22: proc. 2 poly max power 300W min refl. 80W   lindaw at snf.stanford.edu
• Shutdown drytek2 SNF 2009-01-14 07:32:15: Shutting down to work on matching network ...   shott at snf.stanford.edu
• Shutdown drytek2 SNF 2009-01-14 07:32:15: Shutting down to work on matching network ...   shott at snf.stanford.edu
• Shutdown drytek2 SNF 2009-01-21 11:40:09: Matching network upgrade ....   shott at snf.stanford.edu
• Shutdown drytek2 SNF 2009-01-21 11:40:09: Matching network upgrade ....   shott at snf.stanford.edu

Last message date: Fri Jan 23 10:29:28 PST 2009
Archived on: Fri Jan 11 13:05:11 PST 2013

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