From latta at snf.stanford.edu Thu Jul 2 15:08:10 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Jul 2009 15:08:10 -0700 Subject: Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch Message-ID: Started at about 365 and in four minutes went down to about 106. Reflected was steady, i.e., I couldn't budge with coil or cap, at 65W From eenriquez at snf.stanford.edu Mon Jul 6 09:29:00 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:29:00 -0700 Subject: Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch Message-ID: Ran the nitride recipe for 50 minutes with no problems. The power was stable at 500W with ~ 14W reflected. From eenriquez at snf.stanford.edu Mon Jul 6 09:29:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:29:33 -0700 Subject: Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works! Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 6 09:29:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:29:50 -0700 Subject: Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 6 09:30:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:30:01 -0700 Subject: Comment drytek2 SNF 2009-06-21 11:13:02: Process #1 (O2 descum) went well Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 6 09:30:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 09:30:24 -0700 Subject: Comment drytek2 SNF 2009-06-18 22:01:34: descum works great Message-ID: Archived From lindaw at snf.stanford.edu Sat Jul 11 12:11:01 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Jul 2009 12:11:01 -0700 Subject: Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1 Message-ID: Plasma won't spark without overcranking the coil clockwise, then backing it back down slowly. Same with program 2 poly etch. Once programs tuned, reverse power drifts upward during run (1-2 minutes). From eenriquez at snf.stanford.edu Mon Jul 13 10:47:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Jul 2009 10:47:11 -0700 Subject: Comment drytek2 SNF 2009-07-13 10:47:11: Power drift update Message-ID: Ran O2 descum recipe. During the first run, the plasma ignited immediately with 500 W power and 1 W reflected. After ten minutes, the power dropped from 500W to 480 W with 28 W reflected. Vented the chamber and ran the recipe again. The plasma ignited immediately. Minor adjustment tuning adjustment. Starting power was 502 W with 0 W reflected. After 10 minutes, it dropped down to 498 W with and 8 W reflected. After 20 minutes, the power dropped to 497 W with 9 W reflected. From lindaw at snf.stanford.edu Tue Jul 21 13:01:03 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 21 Jul 2009 13:01:03 -0700 Subject: Problem drytek2 SNF 2009-07-21 13:01:02: locating pin missing from back of top platen Message-ID: The right rear locating pin is missing from the top most platen. From eenriquez at snf.stanford.edu Tue Jul 21 15:10:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Jul 2009 15:10:59 -0700 Subject: Comment drytek2 SNF 2009-07-21 15:10:58: Update teflon pin Message-ID: The right-rear teflon pin on the upper electrode broke off. Unable to extract the broken piece out of the pin hole. Might need to take the whole elctrode out of the system. From cbaxter at snf.stanford.edu Tue Jul 21 15:45:56 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Jul 2009 15:45:56 -0700 Subject: Shutdown drytek2 SNF 2009-07-21 15:45:56: Removing broken teflon pin. Message-ID: From cbaxter at snf.stanford.edu Tue Jul 21 17:03:54 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Jul 2009 17:03:54 -0700 Subject: Shutdown drytek2 SNF 2009-07-21 15:45:56: Removing broken teflon pin. Message-ID: Removed broken teflon pin and installed new one. From cbaxter at snf.stanford.edu Tue Jul 21 17:04:01 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Jul 2009 17:04:01 -0700 Subject: Comment drytek2 SNF 2009-07-21 15:10:58: Update teflon pin Message-ID: From cbaxter at snf.stanford.edu Tue Jul 21 17:04:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Jul 2009 17:04:14 -0700 Subject: Problem drytek2 SNF 2009-07-21 13:01:02: locating pin missing from back of top platen Message-ID: From ytcheng at snf.stanford.edu Sun Jul 26 13:23:29 2009 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Sun, 26 Jul 2009 13:23:29 -0700 Subject: Problem drytek2 SNF 2009-07-26 13:23:28: plasma is not started Message-ID: I ran a nitride etch process, but the plasma was not started within 20 min. From lindaw at snf.stanford.edu Mon Jul 27 15:33:20 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 27 Jul 2009 15:33:20 -0700 Subject: Shutdown drytek2 SNF 2009-07-27 15:33:20: chamber won't pump down to below 29 mT. Message-ID: The chamber won't pump down to the pressure set point to trigger the gasses to turn on. It sits at 29 - 30 mT and won't pump down any further. It is un-usable in this condition. Sorry folks. From eenriquez at snf.stanford.edu Tue Jul 28 10:17:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Jul 2009 10:17:05 -0700 Subject: Shutdown drytek2 SNF 2009-07-27 15:33:20: chamber won't pump down to below 29 mT. Message-ID: Wiped down door o-ring. Chamber pumps down to 12 mT. Cycled many times without a problem. From yeh at snf.stanford.edu Tue Jul 28 15:22:04 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 28 Jul 2009 15:22:04 -0700 Subject: Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step Message-ID: pumps down to ~17mtorr but recipe will not continue with setting up gas flow and plasma. From skoh at snf.stanford.edu Tue Jul 28 15:50:44 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 28 Jul 2009 15:50:44 -0700 Subject: Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT Message-ID: Same problem as Yeh. Running process 1 descum. The chamber pumps down to 17mT, but then sits at that pressure, not going back up to process pressure of 150mT. There is a red light on the O2 deviation. After trying several times, placing the chamber into standby first before running process appears to work. From yoonjin at snf.stanford.edu Tue Jul 28 19:15:30 2009 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Tue, 28 Jul 2009 19:15:30 -0700 Subject: Problem drytek2 SNF 2009-07-28 19:15:30: maximum RF power Message-ID: Same thing happened. (process doesn't start mostly.) I tried several times from the standby condition. Even I can start the process, I see maximum RF power around 350. From bchui at snf.stanford.edu Wed Jul 29 01:19:29 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 29 Jul 2009 01:19:29 -0700 Subject: Shutdown drytek2 SNF 2009-07-29 01:19:29: Pressure stuck at 17mT Message-ID: Same situation as reported by previous two users. "Standby" trick didn't work after many tries. Shutting down to reflect true status. From eenriquez at snf.stanford.edu Wed Jul 29 13:21:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Jul 2009 13:21:45 -0700 Subject: Shutdown drytek2 SNF 2009-07-29 01:19:29: Pressure stuck at 17mT Message-ID: Drained vacuum pump demister. From jrjain at snf.stanford.edu Wed Jul 29 20:49:47 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 29 Jul 2009 20:49:47 -0700 Subject: Problem drytek2 SNF 2009-07-29 20:49:47: Same pressure problems... Message-ID: ..as yeh and skoh, but with Process #3 (nitride etch) From mdickey at snf.stanford.edu Thu Jul 30 08:31:38 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 30 Jul 2009 08:31:38 -0700 Subject: Shutdown drytek2 SNF 2009-07-30 08:31:38: O ring Message-ID: Need to replace door O ring From mdickey at snf.stanford.edu Thu Jul 30 14:01:44 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 30 Jul 2009 14:01:44 -0700 Subject: Shutdown drytek2 SNF 2009-07-30 08:31:38: O ring Message-ID: Cleaned up O ring sealing surface. From eenriquez at snf.stanford.edu Thu Jul 30 14:46:08 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Jul 2009 14:46:08 -0700 Subject: Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem Message-ID: The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT. Adjusted the crossover setpoint to 24 mT. Now process starts when the pressure is < 20mT. Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox. From eenriquez at snf.stanford.edu Fri Jul 31 09:14:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:14:30 -0700 Subject: Comment drytek2 SNF 2009-06-17 19:19:08: Update tuning problem Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 09:17:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:17:06 -0700 Subject: Problem drytek2 SNF 2009-07-29 20:49:47: Same pressure problems... Message-ID: The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT. Adjusted the crossover setpoint to 24 mT. Now process starts when the pressure is < 20mT. Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox. .... Cycled 10 more times this morning with no pressure crossover problems. From eenriquez at snf.stanford.edu Fri Jul 31 09:18:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:18:41 -0700 Subject: Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT Message-ID: The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT. Adjusted the crossover setpoint to 24 mT. Now process starts when the pressure is < 20mT. Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox. From eenriquez at snf.stanford.edu Fri Jul 31 09:18:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:18:47 -0700 Subject: Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step Message-ID: The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT. Adjusted the crossover setpoint to 24 mT. Now process starts when the pressure is < 20mT. Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox. From eenriquez at snf.stanford.edu Fri Jul 31 09:18:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:18:52 -0700 Subject: Problem drytek2 SNF 2009-07-26 13:23:28: plasma is not started Message-ID: The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT. Adjusted the crossover setpoint to 24 mT. Now process starts when the pressure is < 20mT. Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox. From eenriquez at snf.stanford.edu Fri Jul 31 09:24:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:24:09 -0700 Subject: Problem drytek2 SNF 2009-07-28 19:15:30: maximum RF power Message-ID: Did not observe the problem. Ran 20 minute nitride etch recipe 4x. Each time the power drifted down about 3-4 watts while the reflected increased by 1-2 watts. From eenriquez at snf.stanford.edu Fri Jul 31 09:24:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:24:24 -0700 Subject: Comment drytek2 SNF 2009-07-13 10:47:11: Power drift update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 09:25:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:25:11 -0700 Subject: Problem drytek2 SNF 2009-06-18 16:14:22: Still extremely difficult to get plasma Message-ID: Modified the coil so that a constant tension is applied to the coil's rotary contacts. Now able to smoothly tune using the coil. Was able to run the SF6 recipe for 20 min without problems. The reflected power = 5W. Will continue to test. From eenriquez at snf.stanford.edu Fri Jul 31 09:25:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:25:22 -0700 Subject: Problem drytek2 SNF 2009-06-14 14:01:20: Tuning problems Message-ID: Modified the coil so that a constant tension is applied to the coil's rotary contacts. Now able to smoothly tune using the coil. Was able to run the SF6 recipe for 20 min without problems. The reflected power = 5W. Will continue to test. From eenriquez at snf.stanford.edu Fri Jul 31 09:25:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:25:30 -0700 Subject: Problem drytek2 SNF 2009-06-13 17:07:08: Extremely difficult to tune Message-ID: Modified the coil so that a constant tension is applied to the coil's rotary contacts. Now able to smoothly tune using the coil. Was able to run the SF6 recipe for 20 min without problems. The reflected power = 5W. Will continue to test. From eenriquez at snf.stanford.edu Fri Jul 31 09:25:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:25:47 -0700 Subject: Comment drytek2 SNF 2009-06-18 16:56:14: Can we keep the machine up for descum please? Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 09:25:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:25:58 -0700 Subject: Comment drytek2 SNF 2009-06-18 16:58:01: Especially since gasonics is also down.. Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 09:26:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:26:16 -0700 Subject: Problem drytek2 SNF 2009-06-18 17:09:58: Nitride etch warning! Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 09:26:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:26:33 -0700 Subject: Problem drytek2 SNF 2009-06-18 20:09:02: descum didn't work Message-ID: Modified the coil so that a constant tension is applied to the coil's rotary contacts. Now able to smoothly tune using the coil. Was able to run the SF6 recipe for 20 min without problems. The reflected power = 5W. Will continue to test.