Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jul 2 15:08:10 PDT 2009


Started at about 365 and in four minutes went down to about 106.  Reflected was steady, i.e., I couldn't budge with coil or cap, at 65W




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