Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 6 09:29:00 PDT 2009

Previous message: Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch
Next message: Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works!
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran the nitride recipe for 50 minutes with no problems.  The power was stable at 500W with ~ 14W reflected.

Previous message: Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch
Next message: Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works!
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list