Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 6 09:29:00 PDT 2009


Ran the nitride recipe for 50 minutes with no problems.  The power was stable at 500W with ~ 14W reflected.




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