Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Jul 11 12:11:01 PDT 2009


Plasma won't spark without overcranking the coil clockwise, then backing it back down slowly. Same with program 2 poly etch.  Once programs tuned, reverse power drifts upward during run (1-2 minutes).




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