Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Sat Jul 11 12:11:01 PDT 2009
Plasma won't spark without overcranking the coil clockwise, then backing it back down slowly. Same with program 2 poly etch. Once programs tuned, reverse power drifts upward during run (1-2 minutes).
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