Comment drytek2 SNF 2009-07-13 10:47:11: Power drift update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 13 10:47:11 PDT 2009


Ran O2 descum recipe.  During the first run, the plasma ignited immediately with 500 W power and 1 W reflected.  After ten minutes, the power dropped from 500W to 480 W with 28 W reflected.
Vented the chamber and ran the recipe again.  The plasma ignited immediately.  Minor adjustment tuning adjustment.  Starting power was 502 W with 0 W reflected.  After 10 minutes, it dropped down to 498 W with and 8 W reflected.  After 20 minutes, the power dropped to 497 W with 9 W reflected.




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