Problem drytek2 SNF 2009-07-26 13:23:28: plasma is not started

ytcheng at snf.stanford.edu ytcheng at snf.stanford.edu
Sun Jul 26 13:23:29 PDT 2009

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I ran a nitride etch process, but the plasma was not started within 20 min.

Previous message: Shutdown drytek2 SNF 2009-07-21 15:45:56: Removing broken teflon pin.
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