Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Jul 28 15:22:04 PDT 2009

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pumps down to ~17mtorr but recipe will not continue with setting up gas flow and plasma.

Previous message: Shutdown drytek2 SNF 2009-07-27 15:33:20: chamber won't pump down to below 29 mT.
Next message: Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step
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