Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Jul 28 15:50:44 PDT 2009


Same problem as Yeh.  Running process 1 descum.  The chamber pumps down to 17mT, but then sits at that pressure, not going back up to process pressure of 150mT.  There is a red light on the O2 deviation.  After trying several times, placing the chamber into standby first before running process appears to work.




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