Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT

skoh at skoh at
Tue Jul 28 15:50:44 PDT 2009

Same problem as Yeh.  Running process 1 descum.  The chamber pumps down to 17mT, but then sits at that pressure, not going back up to process pressure of 150mT.  There is a red light on the O2 deviation.  After trying several times, placing the chamber into standby first before running process appears to work.

More information about the drytek2-pcs mailing list