Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT
skoh at snf.stanford.edu
skoh at snf.stanford.edu
Tue Jul 28 15:50:44 PDT 2009
Same problem as Yeh. Running process 1 descum. The chamber pumps down to 17mT, but then sits at that pressure, not going back up to process pressure of 150mT. There is a red light on the O2 deviation. After trying several times, placing the chamber into standby first before running process appears to work.
More information about the drytek2-pcs
mailing list