Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step

eenriquez at eenriquez at
Fri Jul 31 09:18:47 PDT 2009

The process start pressure crossover point was set to 20 mT but the controller delayed the process start until the pressure reached 16 mT.
Adjusted the crossover setpoint to 24 mT.  Now process starts when the pressure is < 20mT.
Mike cleaned the door sealing surface and lightly lubricated the door o-ring with krytox.

More information about the drytek2-pcs mailing list