Problem drytek2 SNF 2009-07-28 19:15:30: maximum RF power

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 31 09:24:09 PDT 2009


Did not observe the problem.  Ran 20 minute nitride etch recipe 4x.  Each time the power drifted down about 3-4 watts while the reflected increased by 1-2 watts.




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