July 2009 Archives by subject

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Starting: Thu Jul 2 15:08:10 PDT 2009
Ending: Fri Jul 31 09:26:33 PDT 2009
Messages: 40

Comment drytek2 SNF 2009-06-17 19:19:08: Update tuning problem eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-18 16:56:14: Can we keep the machine up for descum please? eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-18 16:58:01: Especially since gasonics is also down.. eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-18 22:01:34: descum works great eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-21 11:13:02: Process #1 (O2 descum) went well eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works! eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-07-13 10:47:11: Power drift update eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-07-13 10:47:11: Power drift update eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-07-21 15:10:58: Update teflon pin eenriquez at snf.stanford.edu
Comment drytek2 SNF 2009-07-21 15:10:58: Update teflon pin cbaxter at snf.stanford.edu
Comment drytek2 SNF 2009-07-30 14:46:08: Update pressure problem eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-06-13 17:07:08: Extremely difficult to tune eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-06-14 14:01:20: Tuning problems eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-06-18 16:14:22: Still extremely difficult to get plasma eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-06-18 17:09:58: Nitride etch warning! eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-06-18 20:09:02: descum didn't work eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch latta at snf.stanford.edu
Problem drytek2 SNF 2009-07-02 15:08:08: RF pwr decreased during nitride etch eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-11 12:11:01: O2 descdum reverse power drift pgm 1 lindaw at snf.stanford.edu
Problem drytek2 SNF 2009-07-21 13:01:02: locating pin missing from back of top platen lindaw at snf.stanford.edu
Problem drytek2 SNF 2009-07-21 13:01:02: locating pin missing from back of top platen cbaxter at snf.stanford.edu
Problem drytek2 SNF 2009-07-26 13:23:28: plasma is not started ytcheng at snf.stanford.edu
Problem drytek2 SNF 2009-07-26 13:23:28: plasma is not started eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step yeh at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 15:22:03: recipe 1 gets stuck at pump down step eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT skoh at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 15:50:44: Pressure sits at 17mT eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 19:15:30: maximum RF power yoonjin at snf.stanford.edu
Problem drytek2 SNF 2009-07-28 19:15:30: maximum RF power eenriquez at snf.stanford.edu
Problem drytek2 SNF 2009-07-29 20:49:47: Same pressure problems... jrjain at snf.stanford.edu
Problem drytek2 SNF 2009-07-29 20:49:47: Same pressure problems... eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-21 15:45:56: Removing broken teflon pin. cbaxter at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-21 15:45:56: Removing broken teflon pin. cbaxter at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-27 15:33:20: chamber won't pump down to below 29 mT. lindaw at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-27 15:33:20: chamber won't pump down to below 29 mT. eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-29 01:19:29: Pressure stuck at 17mT bchui at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-29 01:19:29: Pressure stuck at 17mT eenriquez at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-30 08:31:38: O ring mdickey at snf.stanford.edu
Shutdown drytek2 SNF 2009-07-30 08:31:38: O ring mdickey at snf.stanford.edu

Last message date: Fri Jul 31 09:26:33 PDT 2009
Archived on: Fri Jan 11 13:05:12 PST 2013

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