From lindaw at snf.stanford.edu Wed Jun 3 15:00:58 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 3 Jun 2009 15:00:58 -0700 Subject: Problem drytek2 SNF 2009-06-03 15:00:57: pressure set point adjustment is lagging Message-ID: pressure set point at 150, pressure reading at 60. adjust pressure set point to 170, pressure reading slowly goes up to 220, then had to set pressure point to 100 to get it to come back down from 220, set to 140 to finally get it to 150 mT. Running process 2. From eenriquez at snf.stanford.edu Mon Jun 8 08:50:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:50:58 -0700 Subject: Problem drytek2 SNF 2009-06-03 15:00:57: pressure set point adjustment is lagging Message-ID: The throttle valve controller setpoint switch was on EXT. It should be in AUTO. From lindaw at snf.stanford.edu Mon Jun 8 12:04:11 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 8 Jun 2009 12:04:11 -0700 Subject: Problem drytek2 SNF 2009-06-08 12:04:11: chamber won't pump down, door leak? Message-ID: From cbaxter at snf.stanford.edu Tue Jun 9 20:05:32 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Jun 2009 20:05:32 -0700 Subject: Problem drytek2 SNF 2009-06-08 12:04:11: chamber won't pump down, door leak? Message-ID: No vacuum leak, the problem was the throttle valve controller. Changed throttle valve controller, the system now can also run up to 3 step process. The system is back to original throttle valve config.. From nvgirish at snf.stanford.edu Thu Jun 11 19:22:55 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 11 Jun 2009 19:22:55 -0700 Subject: Problem drytek2 SNF 2009-06-11 19:22:55: Unable to tune and fire plasma Message-ID: Tried Recipe1 descum. Was able to get plasma but it started flickering and making a crackling noise. Lost plasma after that and power tuning was unresponsive for any changes in Coil and Cap. Tried recipe 2 and could not get Coil and Cap to get plasma for that as well. From cbaxter at snf.stanford.edu Thu Jun 11 19:29:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Jun 2009 19:29:15 -0700 Subject: Problem drytek2 SNF 2009-06-11 19:22:55: Unable to tune and fire plasma Message-ID: Run o2 plasma and was tuned rf w/out problem. From elvislin at snf.stanford.edu Fri Jun 12 12:41:07 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Fri, 12 Jun 2009 12:41:07 -0700 Subject: Problem drytek2 SNF 2009-06-12 12:41:06: high reverse power and no response to the adjustment Message-ID: From nvgirish at snf.stanford.edu Fri Jun 12 14:21:59 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Fri, 12 Jun 2009 14:21:59 -0700 Subject: Comment drytek2 SNF 2009-06-12 14:21:58: Tuned well Message-ID: Recipe 1 tuned with the following values: RF level: 5-0 Coil: 1-80 Cap: 5-5 From cbaxter at snf.stanford.edu Fri Jun 12 15:56:26 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 12 Jun 2009 15:56:26 -0700 Subject: Problem drytek2 SNF 2009-06-12 12:41:06: high reverse power and no response to the adjustment Message-ID: Last user did not have a problem tuning.. From bchui at snf.stanford.edu Sat Jun 13 17:07:09 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 13 Jun 2009 17:07:09 -0700 Subject: Problem drytek2 SNF 2009-06-13 17:07:08: Extremely difficult to tune Message-ID: Couldn't tune nitride etch (for either process 2 or 3). It actually ran successfully for the first half hour, but when I tweaked the cap-tuning knob the plasma collapsed and wouldn't come on again. I could see it trying to come on--but after a flash it would shut down again. I could also hear some crackling sounds as the plasma flashes on and off. It seems like the machine is harder to tune when hot. Girish encountered the same problem earlier today as well. From nvgirish at snf.stanford.edu Sun Jun 14 14:01:20 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Sun, 14 Jun 2009 14:01:20 -0700 Subject: Problem drytek2 SNF 2009-06-14 14:01:20: Tuning problems Message-ID: Rcp 1 tuned well with the values reported before for about 2 min the very first time. Second time the reverse power started increasing after 1min and sensitivity to cap increased. Third time, reverse power increased more after 1min and the plasma was lost at around the same settings. Also, it was even more sensitive to cap rotation. Definitely points to some kind of issue, maybe heating. From bchui at snf.stanford.edu Mon Jun 15 00:25:33 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 15 Jun 2009 00:25:33 -0700 Subject: Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma Message-ID: Based on my and other users' experience this weekend, it's been very difficult or impossible to strike a plasma; tuning is very touchy, and when the plasma does come on it flashes on and off (with accompanying crackling sounds) and lasts only a minute or two. Obviously some component is failing inside (or degrades with heat). Given this, I thought it appropriate to red-light the machine to reflect its true status. From bchui at snf.stanford.edu Tue Jun 16 21:43:38 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 16 Jun 2009 21:43:38 -0700 Subject: Comment drytek2 SNF 2009-06-16 21:43:37: Repairs in progress Message-ID: Per John Shott, staff is working on fixing the inductor tap point assembly. From eenriquez at snf.stanford.edu Wed Jun 17 19:11:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 19:11:55 -0700 Subject: Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma Message-ID: The variable inductor has dirty or damaged contacts. Cleaned the contacts and ran the Descum and Nitride etch recipes with a reflected power < 5 W. Note: The variable inductor is still dirty but is working much better. Adjust it only in coil position narrow range of 2.5 +/- 0.5. If initially the plasma does not strike, sweep the coil position between 2 - 3. Use only the capacitor to improve the tuning once the plasma is on. From eenriquez at snf.stanford.edu Wed Jun 17 19:12:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 19:12:13 -0700 Subject: Comment drytek2 SNF 2009-06-16 21:43:37: Repairs in progress Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 17 19:12:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 19:12:33 -0700 Subject: Comment drytek2 SNF 2009-06-12 14:21:58: Tuned well Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 17 19:19:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 19:19:09 -0700 Subject: Comment drytek2 SNF 2009-06-17 19:19:08: Update tuning problem Message-ID: The variable inductor is still dirty but is working much better. Adjust it the coil position only in a narrow range of 2.5 +/- 0.5. If initially the plasma does not strike, sweep the coil position between 2 - 3. Use only the capacitor to improve the tuning once the plasma is on. We will try to further clean the inductor tomorrow to see if we could improve its performance. We have ordered new inductors but the lead time is about 5 weeks From bchui at snf.stanford.edu Thu Jun 18 16:14:23 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 18 Jun 2009 16:14:23 -0700 Subject: Problem drytek2 SNF 2009-06-18 16:14:22: Still extremely difficult to get plasma Message-ID: I appreciate all the efforts to get the machine in serviceable condition, but I still had extreme difficulty in getting the nitride etch to run after 1 hour of trying. Plasma would come on for a split second then a crackling sound would occur and the plasma would collapse again. I am keeping the coil between 2.0 and 3.0. There were actually some signs of life when I first switched on power but after a few minutes things deteriorated. From bchui at snf.stanford.edu Thu Jun 18 16:26:55 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 18 Jun 2009 16:26:55 -0700 Subject: Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma Message-ID: Other users reported that descum worked fine for 4 min, but I just couldn't get a steady plasma for nitride etch (SF6/O2). From tura at snf.stanford.edu Thu Jun 18 16:56:14 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 18 Jun 2009 16:56:14 -0700 Subject: Comment drytek2 SNF 2009-06-18 16:56:14: Can we keep the machine up for descum please? Message-ID: I understand that nitride etch has problems, but can we keep it yellow ligthed while it's being worked on? I ran a non-critical descum in the morning and it was fine, I need to use it again tonight. From tura at snf.stanford.edu Thu Jun 18 16:58:01 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 18 Jun 2009 16:58:01 -0700 Subject: Comment drytek2 SNF 2009-06-18 16:58:01: Especially since gasonics is also down.. Message-ID: this is the only option for dry pr removal/descum.. From latta at snf.stanford.edu Thu Jun 18 17:07:47 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 18 Jun 2009 17:07:47 -0700 Subject: Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma Message-ID: taking off of shutdown. Will post a warning message for nitride etching and hope to heck it'll work for other etches such as descum. From latta at snf.stanford.edu Thu Jun 18 17:09:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 18 Jun 2009 17:09:58 -0700 Subject: Problem drytek2 SNF 2009-06-18 17:09:58: Nitride etch warning! Message-ID: RF problems reported. I have taken the tool out of shutdown in the hopes that other etches may be performed. If problems persist please shut down the etcher. From kupnik at snf.stanford.edu Thu Jun 18 17:36:33 2009 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Thu, 18 Jun 2009 17:36:33 -0700 Subject: Comment drytek2 SNF 2009-06-18 17:36:32: descum worked fine Message-ID: I followed the instructions from the email from John and everything worked fine. I had around 5 W reverse power only and plasma looked good and stable. From xzhuan1 at snf.stanford.edu Thu Jun 18 20:09:03 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:09:03 -0700 Subject: Problem drytek2 SNF 2009-06-18 20:09:02: descum didn't work Message-ID: fwd power 95w, ref power 70. I wasn't able to tune it any better. From xzhuan1 at snf.stanford.edu Thu Jun 18 20:14:46 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:14:46 -0700 Subject: Shutdown drytek2 SNF 2009-06-18 20:14:45: Message-ID: From cbaxter at snf.stanford.edu Thu Jun 18 21:06:39 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Jun 2009 21:06:39 -0700 Subject: Shutdown drytek2 SNF 2009-06-18 20:14:45: Message-ID: Tuned to o2 gas,. coil setting at 2.85 (do not adjust) if needed to be fine tune adjust the cap. Till having problem tuning on sf6 and o2 gas. From gth at snf.stanford.edu Thu Jun 18 22:01:34 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 18 Jun 2009 22:01:34 -0700 Subject: Comment drytek2 SNF 2009-06-18 22:01:34: descum works great Message-ID: Many thanks to Cesar. 5W was the reflected power. From eenriquez at snf.stanford.edu Fri Jun 19 11:25:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 11:25:25 -0700 Subject: Comment drytek2 SNF 2009-06-19 11:25:24: Update rf tuning Message-ID: Modified the coil so that a constant tension is applied to the coil's rotary contacts. Now able to smoothly tune using the coil. Was able to run the SF6 recipe for 20 min without problems. The reflected power = 5W. Will continue to test. From eenriquez at snf.stanford.edu Fri Jun 19 15:13:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 15:13:17 -0700 Subject: Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning Message-ID: Ran SF6/O2 recipe for over 1 hour without any problems. Reflected power < 5 W. Recipes 1,2 & 3 ran OK. From jrjain at snf.stanford.edu Sun Jun 21 11:13:02 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 21 Jun 2009 11:13:02 -0700 Subject: Comment drytek2 SNF 2009-06-21 11:13:02: Process #1 (O2 descum) went well Message-ID: Tuning wasn't a problem From bchui at snf.stanford.edu Sun Jun 21 19:53:46 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 21 Jun 2009 19:53:46 -0700 Subject: Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works! Message-ID: like a charm.... From bchui at snf.stanford.edu Sun Jun 21 20:12:54 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 21 Jun 2009 20:12:54 -0700 Subject: Comment drytek2 SNF 2009-06-21 20:12:54: Some trays' plasma look brighter than others Message-ID: The 3rd tray from the top looks especially dull (for nitride etch). From lindaw at snf.stanford.edu Wed Jun 24 11:21:35 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 24 Jun 2009 11:21:35 -0700 Subject: Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate. Message-ID: Also, program 1 O2 descum has a lot of drift in the reflected power, to the extent that the plasma cuts out. From eenriquez at snf.stanford.edu Fri Jun 26 08:18:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Jun 2009 08:18:44 -0700 Subject: Comment drytek2 SNF 2009-06-18 17:36:32: descum worked fine Message-ID: Archived From king at snf.stanford.edu Fri Jun 26 22:26:16 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 26 Jun 2009 22:26:16 -0700 Subject: Problem drytek2 SNF 2009-06-26 22:26:15: Third platen down has slower etch rate Message-ID: It had about 25% later visual endpoint, etching a blanket poly film with 100sccm SF6 and 10sccm O2 at 450W 150mT.