Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 17 19:11:55 PDT 2009


The variable inductor has dirty or damaged contacts.  Cleaned the contacts and ran the Descum and Nitride etch recipes  with a reflected power < 5 W.
Note:
     The variable inductor is still dirty but is working much better.  Adjust it only in coil position narrow range of 2.5 +/- 0.5.   If initially the plasma does not strike, sweep the coil position between 2 - 3. Use only  the capacitor to improve the tuning once the plasma is on.




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