Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Jun 17 19:11:55 PDT 2009
The variable inductor has dirty or damaged contacts. Cleaned the contacts and ran the Descum and Nitride etch recipes with a reflected power < 5 W.
Note:
The variable inductor is still dirty but is working much better. Adjust it only in coil position narrow range of 2.5 +/- 0.5. If initially the plasma does not strike, sweep the coil position between 2 - 3. Use only the capacitor to improve the tuning once the plasma is on.
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