Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Jun 18 16:26:55 PDT 2009


Other users reported that descum worked fine for 4 min, but I just couldn't get a steady plasma for nitride etch (SF6/O2).




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