Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 18 17:07:47 PDT 2009


taking off of shutdown.  Will post a warning message for nitride etching and hope to heck it'll work for other etches such as descum.




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