Problem drytek2 SNF 2009-06-18 17:09:58: Nitride etch warning!

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 18 17:09:58 PDT 2009


RF problems reported.  I have taken the tool out of shutdown in the hopes that other etches may be performed.
If problems persist please shut down the etcher.




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