Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jun 19 15:13:17 PDT 2009
Ran SF6/O2 recipe for over 1 hour without any problems. Reflected power < 5 W. Recipes 1,2 & 3 ran OK.
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