Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 19 15:13:17 PDT 2009


Ran SF6/O2 recipe for over 1 hour without any problems.  Reflected power < 5 W.  Recipes 1,2 & 3 ran OK.




More information about the drytek2-pcs mailing list