Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate.

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Jun 24 11:21:35 PDT 2009


Also, program 1 O2 descum has a lot of drift in the reflected power, to the extent that the plasma cuts out.




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