Problem drytek2 SNF 2009-06-26 22:26:15: Third platen down has slower etch rate

king at snf.stanford.edu king at snf.stanford.edu
Fri Jun 26 22:26:16 PDT 2009


It had about 25% later visual endpoint, etching a blanket poly film with 100sccm SF6 and 10sccm O2 at 450W 150mT.  




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