June 2009 Archives by author

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Starting: Wed Jun 3 15:00:58 PDT 2009
Ending: Fri Jun 26 22:26:16 PDT 2009
Messages: 36

• Problem drytek2 SNF 2009-06-13 17:07:08: Extremely difficult to tune   bchui at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma   bchui at snf.stanford.edu
• Comment drytek2 SNF 2009-06-16 21:43:37: Repairs in progress   bchui at snf.stanford.edu
• Problem drytek2 SNF 2009-06-18 16:14:22: Still extremely difficult to get plasma   bchui at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma   bchui at snf.stanford.edu
• Comment drytek2 SNF 2009-06-21 19:53:45: Nitride etch works!   bchui at snf.stanford.edu
• Comment drytek2 SNF 2009-06-21 20:12:54: Some trays' plasma look brighter than others   bchui at snf.stanford.edu
• Problem drytek2 SNF 2009-06-08 12:04:11: chamber won't pump down, door leak?   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-06-11 19:22:55: Unable to tune and fire plasma   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-06-12 12:41:06: high reverse power and no response to the adjustment   cbaxter at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-18 20:14:45:   cbaxter at snf.stanford.edu
• Problem drytek2 SNF 2009-06-03 15:00:57: pressure set point adjustment is lagging   eenriquez at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-15 00:25:32: Couldn't get plasma   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-16 21:43:37: Repairs in progress   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-12 14:21:58: Tuned well   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-17 19:19:08: Update tuning problem   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-19 11:25:24: Update rf tuning   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-19 15:13:16: Update rf tuning   eenriquez at snf.stanford.edu
• Comment drytek2 SNF 2009-06-18 17:36:32: descum worked fine   eenriquez at snf.stanford.edu
• Problem drytek2 SNF 2009-06-12 12:41:06: high reverse power and no response to the adjustment   elvislin at snf.stanford.edu
• Comment drytek2 SNF 2009-06-18 22:01:34: descum works great   gth at snf.stanford.edu
• Comment drytek2 SNF 2009-06-21 11:13:02: Process #1 (O2 descum) went well   jrjain at snf.stanford.edu
• Problem drytek2 SNF 2009-06-26 22:26:15: Third platen down has slower etch rate   king at snf.stanford.edu
• Comment drytek2 SNF 2009-06-18 17:36:32: descum worked fine   kupnik at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-18 16:26:54: Nitride etch: no plasma   latta at snf.stanford.edu
• Problem drytek2 SNF 2009-06-18 17:09:58: Nitride etch warning!   latta at snf.stanford.edu
• Problem drytek2 SNF 2009-06-03 15:00:57: pressure set point adjustment is lagging   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-06-08 12:04:11: chamber won't pump down, door leak?   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-06-24 11:21:35: 3rd platen from top slower poly etch rate.   lindaw at snf.stanford.edu
• Problem drytek2 SNF 2009-06-11 19:22:55: Unable to tune and fire plasma   nvgirish at snf.stanford.edu
• Comment drytek2 SNF 2009-06-12 14:21:58: Tuned well   nvgirish at snf.stanford.edu
• Problem drytek2 SNF 2009-06-14 14:01:20: Tuning problems   nvgirish at snf.stanford.edu
• Comment drytek2 SNF 2009-06-18 16:56:14: Can we keep the machine up for descum please?   tura at snf.stanford.edu
• Comment drytek2 SNF 2009-06-18 16:58:01: Especially since gasonics is also down..   tura at snf.stanford.edu
• Problem drytek2 SNF 2009-06-18 20:09:02: descum didn't work   xzhuan1 at snf.stanford.edu
• Shutdown drytek2 SNF 2009-06-18 20:14:45:   xzhuan1 at snf.stanford.edu

Last message date: Fri Jun 26 22:26:16 PDT 2009
Archived on: Fri Jan 11 13:05:12 PST 2013

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