From jtsai at snf.stanford.edu Mon Mar 2 15:21:43 2009 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Mon, 2 Mar 2009 15:21:43 -0800 Subject: Problem drytek2 SNF 2009-03-02 15:21:42: no power displayed Message-ID: on the box, RF ON was green, but no power output and the display was blank. From king at snf.stanford.edu Mon Mar 2 16:10:22 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:10:22 -0800 Subject: Shutdown drytek2 SNF 2009-03-02 16:10:21: No power Message-ID: Cannot get any fwd power. Staff and other users also stumped; have read the new instructions from John, and it's enabled. Thanks. From shott at snf.stanford.edu Mon Mar 2 16:55:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:55:53 -0800 Subject: Problem drytek2 SNF 2009-03-02 15:21:42: no power displayed Message-ID: Batteires in the display were dead (these will be replaced by an independent DC-DC converter in the next day or so) plus the little power supply that powers the interface box came unplugged. I've got it powered by the Utility plug until I can come up with a better solution. John From shott at snf.stanford.edu Mon Mar 2 16:55:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:55:59 -0800 Subject: Shutdown drytek2 SNF 2009-03-02 16:10:21: No power Message-ID: Batteires in the display were dead (these will be replaced by an independent DC-DC converter in the next day or so) plus the little power supply that powers the interface box came unplugged. I've got it powered by the Utility plug until I can come up with a better solution. John From latta at snf.stanford.edu Tue Mar 3 13:28:35 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:28:35 -0800 Subject: Problem drytek2 SNF 2009-01-08 12:21:58: RF drifting Message-ID: fixed with new prw supply From latta at snf.stanford.edu Tue Mar 3 13:28:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:28:48 -0800 Subject: Problem drytek2 SNF 2009-01-13 11:29:45: RF Power still drifting Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:29:28 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:29:28 -0800 Subject: Problem drytek2 SNF 2009-01-14 12:29:12: power & tuning unstable process 1&2 Message-ID: Whack no more! From latta at snf.stanford.edu Tue Mar 3 13:29:41 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:29:41 -0800 Subject: Problem drytek2 SNF 2009-01-15 11:59:37: RF level knob Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:29:49 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:29:49 -0800 Subject: Problem drytek2 SNF 2009-01-20 08:50:23: RF power still drifting Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:30:05 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:30:05 -0800 Subject: Problem drytek2 SNF 2009-01-22 16:14:22: proc. 2 poly max power 300W min refl. 80W Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:30:22 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:30:22 -0800 Subject: Comment drytek2 SNF 2009-01-23 10:29:28: Process2 poly etch Message-ID: better now From latta at snf.stanford.edu Tue Mar 3 13:30:43 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:30:43 -0800 Subject: Problem drytek2 SNF 2009-02-04 21:53:27: Process 3 Power Problem Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:30:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:30:58 -0800 Subject: Problem drytek2 SNF 2009-02-24 00:23:48: cannot tune power in program 3 Message-ID: fixed From latta at snf.stanford.edu Tue Mar 3 13:32:03 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 13:32:03 -0800 Subject: Comment drytek2 SNF 2009-02-27 14:14:12: digital readout "LOBAT" Message-ID: batteries replaced- more permanent solution coming soon! From shott at snf.stanford.edu Tue Mar 3 16:41:55 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 3 Mar 2009 16:41:55 -0800 Subject: Problem drytek2 SNF 2008-07-30 19:19:43: RF Matching network Message-ID: Tuning network was improved by increasing the fixed capacitance by 100 pF and by reducing the fixed inductor that is in parallel with the roller inductor. Now we can generally find a minimum of reflected power .... John From jrjain at snf.stanford.edu Tue Mar 3 17:44:38 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 3 Mar 2009 17:44:38 -0800 Subject: Problem drytek2 SNF 2009-03-03 17:44:38: "LOBAT" Message-ID: "LOBAT" on Reverse Power readout of new display From shott at snf.stanford.edu Tue Mar 3 18:38:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 3 Mar 2009 18:38:11 -0800 Subject: Problem drytek2 SNF 2009-03-03 17:44:38: "LOBAT" Message-ID: I've replaced the 9V battery in the black readout box. This is, I believe, an interim problem. These readout units require a 9V supply with an isolated ground. The quickest way to get that was with a 9V battery .... but clearly batteries are not the proper long term solution. Today, we received our order of 5V to 9V DC-DC converters. As soon as we have a chance to install them, we will eliminate the battery life problem completely. I will hope to get that done in the next 24 hours or so. But if I can't I've left 3 9V batteries to be used as replaements in the readout box. Thanks, John From masaharu at snf.stanford.edu Thu Mar 5 18:11:53 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 5 Mar 2009 18:11:53 -0800 Subject: Problem drytek2 SNF 2009-03-05 18:11:53: very unstable power Message-ID: I ran PR stipe recipe. For the first two runs, the power was nicely stable, however for the third run, the power suddenly became unstable. The display showed -1000 - +1000 !! in both forward and reflection. In the end, the numbers disappeared from the panel, nothing is shown even the power source is turned on. From shott at snf.stanford.edu Thu Mar 5 18:33:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 5 Mar 2009 18:33:00 -0800 Subject: Problem drytek2 SNF 2009-03-05 18:11:53: very unstable power Message-ID: Power is stable .... battery in display unit died and has been replaced. Battery will be permanently replace with a DC-DC converter soon ... John From lindaw at snf.stanford.edu Fri Mar 6 09:56:51 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 6 Mar 2009 09:56:51 -0800 Subject: Problem drytek2 SNF 2009-03-06 09:56:51: SF6 no flow the readout stuck at 19 Message-ID: adjusting the flow controller has no effect on the readout. Also, the new forward/reverse power meter display is blacked out. the rf on light comes on, but the power readout displays do not illuminate, so no way to tell what the power readings are. From shott at snf.stanford.edu Fri Mar 6 11:19:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 6 Mar 2009 11:19:16 -0800 Subject: Shutdown drytek2 SNF 2009-03-06 11:19:15: Investigating DC-DC converter issues .... Message-ID: From cbaxter at snf.stanford.edu Fri Mar 6 21:50:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Mar 2009 21:50:15 -0800 Subject: Problem drytek2 SNF 2009-03-06 09:56:51: SF6 no flow the readout stuck at 19 Message-ID: Reseated mfc controller and zeroed display reading. From shott at snf.stanford.edu Sat Mar 7 15:12:02 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 7 Mar 2009 15:12:02 -0800 Subject: Shutdown drytek2 SNF 2009-03-06 11:19:15: Investigating DC-DC converter issues .... Message-ID: It appears as if the primary problem that we were experiencing was due to a broken ground wire. Once that was repaired both the DC-DC converter and the Forward/Reverse displays seem to be reading properly. Also, the 27mV error is gone. So, while I'll keep an eye on this machine to see how long this lasts, I believe that things are working properly now and that we can release it for full operation. John From king at snf.stanford.edu Mon Mar 23 20:46:44 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 23 Mar 2009 20:46:44 -0700 Subject: Comment drytek2 SNF 2009-03-23 20:46:43: working well Message-ID: I've been using this tool after the repairs and upgrade and it's working reliably again. Thank you. From yeh at snf.stanford.edu Fri Mar 27 15:04:25 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 27 Mar 2009 15:04:25 -0700 Subject: Problem drytek2 SNF 2009-03-27 15:04:25: reflected power on the high side Message-ID: O2 plasma descum recipe #1 (100sccm O2, 150mtorr, 500W). Reflected power at best 25W. From eenriquez at snf.stanford.edu Tue Mar 31 08:50:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Mar 2009 08:50:17 -0700 Subject: Problem drytek2 SNF 2009-03-27 15:04:25: reflected power on the high side Message-ID: Able to tune the Descum recipe to about 17 W reflected power. RF Tuning tip: Start by setting the capacitor to the 50% mark