Problem drytek2 SNF 2009-01-22 16:14:22: proc. 2 poly max power 300W min refl. 80W
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Mar 3 13:30:05 PST 2009
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Problem drytek2 SNF 2009-01-20 08:50:23: RF power still drifting
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Comment drytek2 SNF 2009-01-23 10:29:28: Process2 poly etch
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fixed
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Problem drytek2 SNF 2009-01-20 08:50:23: RF power still drifting
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Comment drytek2 SNF 2009-01-23 10:29:28: Process2 poly etch
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