Problem drytek2 SNF 2009-03-27 15:04:25: reflected power on the high side

yeh at snf.stanford.edu yeh at snf.stanford.edu
Fri Mar 27 15:04:25 PDT 2009


O2 plasma descum recipe #1 (100sccm O2, 150mtorr, 500W).
Reflected power at best 25W.




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