From eenriquez at snf.stanford.edu Fri Nov 6 07:40:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Nov 2009 07:40:04 -0800 Subject: Comment drytek2 SNF 2009-10-18 22:02:27: Standby Purge Message-ID: Archived From eenriquez at snf.stanford.edu Fri Nov 6 07:40:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Nov 2009 07:40:29 -0800 Subject: Comment drytek2 SNF 2009-10-10 15:45:30: pgm 1 & 2 were way out of tune Message-ID: Archived From eenriquez at snf.stanford.edu Fri Nov 6 09:39:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Nov 2009 09:39:38 -0800 Subject: Comment drytek2 SNF 2009-11-06 09:39:38: Completed Monthly PM Message-ID: From slcheng at snf.stanford.edu Sat Nov 7 19:40:36 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 7 Nov 2009 19:40:36 -0800 Subject: Problem drytek2 SNF 2009-11-07 19:40:35: RF power not stable Message-ID: Process 2 jump from 400 to 200 during the etching process. Try to bring it back to 400. It stays only 20 to 30 secs and drop again. From cbaxter at snf.stanford.edu Sun Nov 8 21:52:35 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Nov 2009 21:52:35 -0800 Subject: Problem drytek2 SNF 2009-11-07 19:40:35: RF power not stable Message-ID: Run process#1 using o2 /sf6 for 30 w/out problem. From gth at snf.stanford.edu Mon Nov 9 03:59:41 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 9 Nov 2009 03:59:41 -0800 Subject: Shutdown drytek2 SNF 2009-11-09 03:59:40: descum recipe not working. Message-ID: unable to tune RF. Reflected power = 60 From eenriquez at snf.stanford.edu Mon Nov 9 09:11:31 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Nov 2009 09:11:31 -0800 Subject: Shutdown drytek2 SNF 2009-11-09 03:59:40: descum recipe not working. Message-ID: No problem found. Lowered the RF power from 800 watts. Cycled 3X. Ran for 20 mins the 1st time and about 2 mins the 2nd and 3rd test. From king at snf.stanford.edu Mon Nov 9 17:02:58 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 9 Nov 2009 17:02:58 -0800 Subject: Problem drytek2 SNF 2009-11-09 17:02:57: Very unstable plasma Message-ID: It doesn't hold a plasma longer than a minute or two, using poly etch process. If you just need an O2 descum you might be OK. From king at snf.stanford.edu Mon Nov 9 17:09:30 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 9 Nov 2009 17:09:30 -0800 Subject: Comment drytek2 SNF 2009-11-09 17:09:29: plasma dies Message-ID: .. after being tuned to 10 W reflected. It might hold the plasma for a minute while nicely tuned, but then dies. From king at snf.stanford.edu Tue Nov 10 08:08:38 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 10 Nov 2009 08:08:38 -0800 Subject: Comment drytek2 SNF 2009-11-10 08:08:38: Quick request Message-ID: Elmer, if you can get the Process #2 poly etch program (SF6= 117, F22= 51, 400W, 150mT) to stay stable for 20 minutes ( a good test) could you please write down your coil and cap settings in the logbook and also here? Thanks. From eenriquez at snf.stanford.edu Tue Nov 10 15:02:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Nov 2009 15:02:55 -0800 Subject: Comment drytek2 SNF 2009-11-10 15:02:55: Update unstable plasma Message-ID: Poly etch recipe still not very stable. Cleaned up some loose teflon insulator from the aluminum rf conductor behind the bottom electrode. Descum recipe seems to run OK. Need further troubleshooting. Might need to rebuild the electrode assembly and/or replace the coil. From latta at snf.stanford.edu Wed Nov 11 13:07:20 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Nov 2009 13:07:20 -0800 Subject: Problem drytek2 SNF 2009-11-09 17:02:57: Very unstable plasma Message-ID: archived From latta at snf.stanford.edu Wed Nov 11 13:07:29 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Nov 2009 13:07:29 -0800 Subject: Comment drytek2 SNF 2009-11-09 17:09:29: plasma dies Message-ID: archived From king at snf.stanford.edu Wed Nov 11 14:51:21 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 11 Nov 2009 14:51:21 -0800 Subject: Problem drytek2 SNF 2009-11-11 14:51:20: Cannot etch films Message-ID: per last maintenance report. Might work for 300 sec O2 descum. From king at snf.stanford.edu Wed Nov 11 14:52:59 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 11 Nov 2009 14:52:59 -0800 Subject: Comment drytek2 SNF 2009-11-11 14:52:58: 30 sec O2 Message-ID: not 300 From latta at snf.stanford.edu Wed Nov 11 16:28:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Nov 2009 16:28:07 -0800 Subject: Comment drytek2 SNF 2009-11-11 16:28:07: O2 recipes ok Message-ID: Held at 500W, 12-13 W reflected for about 5 mins. This is process1, the descum recipe. From xzhuan1 at snf.stanford.edu Thu Nov 12 17:10:21 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 12 Nov 2009 17:10:21 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:10:21: nitride etch plasma not stable Message-ID: plasma not stable. power jumped between 500w and 250 no matter how I tuned it. From jasmine at snf.stanford.edu Thu Nov 12 17:15:51 2009 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Thu, 12 Nov 2009 17:15:51 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:15:51: rf jerks around Message-ID: rf is unstable ...please fix me!! From ericp at snf.stanford.edu Thu Nov 12 17:17:39 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 12 Nov 2009 17:17:39 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:17:38: Cannot sustain plasma Message-ID: Tried to help user tune, and nothing worked. From lindaw at snf.stanford.edu Sat Nov 14 11:28:34 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 14 Nov 2009 11:28:34 -0800 Subject: Comment drytek2 SNF 2009-11-14 11:28:34: plasma seems fine Message-ID: retuned cap and coil for process 1 & 2. Plasma seems fine. From cbaxter at snf.stanford.edu Sun Nov 15 20:16:29 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 15 Nov 2009 20:16:29 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:10:21: nitride etch plasma not stable Message-ID: From cbaxter at snf.stanford.edu Sun Nov 15 20:18:02 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 15 Nov 2009 20:18:02 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:15:51: rf jerks around Message-ID: Cleaned adjustable inductor... From cbaxter at snf.stanford.edu Sun Nov 15 20:22:04 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 15 Nov 2009 20:22:04 -0800 Subject: Problem drytek2 SNF 2009-11-12 17:17:38: Cannot sustain plasma Message-ID: Cleaned adjustable inductor, it was hard at first tuning with freon/sf6 gas at 150m/t pressure (o2 plasma has no problem tuning). I ran polyetch recipe 3x for 10mins and was able to tuned wtih reflective power as low as 10watts. From cbaxter at snf.stanford.edu Sun Nov 15 20:34:20 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 15 Nov 2009 20:34:20 -0800 Subject: Problem drytek2 SNF 2009-11-11 14:51:20: Cannot etch films Message-ID: From xzhuan1 at snf.stanford.edu Mon Nov 16 09:46:04 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Mon, 16 Nov 2009 09:46:04 -0800 Subject: Problem drytek2 SNF 2009-11-16 09:46:04: plasma went on and off Message-ID: From lindaw at snf.stanford.edu Mon Nov 16 11:11:57 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:11:57 -0800 Subject: Problem drytek2 SNF 2009-11-16 11:11:57: NO F22 FLOW!!!! Message-ID: The whitey valve is on and the dip switches are in the on position, but there is no, zip, zilch nada flow and the plasma is deep blue (SF6 only) process 2 poly etch. From lindaw at snf.stanford.edu Mon Nov 16 11:20:26 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:20:26 -0800 Subject: Comment drytek2 SNF 2009-11-16 11:20:24: cap and coil settings for O2 and poly Message-ID: I have found the plasma to be tuned and stable at these settings: O2 descum coil 282 cap 558 process 1 poly etch coil 282 cap 612 process 2 coil may need slight adjustment during start of run for O2 descum. From shott at snf.stanford.edu Mon Nov 16 11:46:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:46:59 -0800 Subject: Comment drytek2 SNF 2009-11-16 11:46:58: Message-ID: While I don't yet know why Linda is experiencing no F22 flow, it appears as if we DO still have F22 in the tank: The low pressure side is reading 16 PSIG, the high pressure side is reading 146 PSIG .... which, I think, is about right for still having liquid in the tank. The current weight of the cylinder is 67.7 pounds ... but I can't figure out what the tare weight of this cylinder is so can't say exactly how much we have left. My guess, is that we are getting pretty close to empty and should likely order another cylinder if we don't already have one. Thanks, John From eenriquez at snf.stanford.edu Mon Nov 16 11:54:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:54:46 -0800 Subject: Problem drytek2 SNF 2009-11-16 11:11:57: NO F22 FLOW!!!! Message-ID: Found the shutoff valve (round handle) was closed. From shott at snf.stanford.edu Mon Nov 16 14:59:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 16 Nov 2009 14:59:25 -0800 Subject: Comment drytek2 SNF 2009-11-16 14:59:25: Tare weight of F22 cylinder .... Message-ID: I've contacted Arkema that manufactures the Forane F22 that we use. This is their standard size cylinder that has a tare weight of 48 pounds and a net weight of product when full of 125 lbs. Our current cylinder weight is 67.7 lbs .... so we have just less than 20 lbs remaining. We should check Mike's records to find out how quickly that weight has been changing .... probably not too rapidly .... but we should probably get ready to order a replacement cylinder so that we have one on hand. Thanks, John From bchui at snf.stanford.edu Mon Nov 16 21:48:31 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 16 Nov 2009 21:48:31 -0800 Subject: Comment drytek2 SNF 2009-11-16 21:48:31: Sf6/O2 nitride etch worked fine Message-ID: From lindaw at snf.stanford.edu Tue Nov 17 13:54:19 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 17 Nov 2009 13:54:19 -0800 Subject: Comment drytek2 SNF 2009-11-17 13:54:18: F22 flow was resolved Message-ID: It turned out that someone, for reasons unbeknownst to me, turned the f22 gas off at the round handles valve below the whitey valves. Elmer noticed this and opened the valve. Why someone would close that valve, I have no clue. From eenriquez at snf.stanford.edu Wed Nov 18 16:32:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:32:20 -0800 Subject: Comment drytek2 SNF 2009-11-10 15:02:55: Update unstable plasma Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 16:32:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:32:29 -0800 Subject: Comment drytek2 SNF 2009-11-10 08:08:38: Quick request Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 16:32:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:32:44 -0800 Subject: Comment drytek2 SNF 2009-11-16 11:46:58: Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 16:32:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:32:55 -0800 Subject: Comment drytek2 SNF 2009-11-16 14:59:25: Tare weight of F22 cylinder .... Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 16:33:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:33:03 -0800 Subject: Comment drytek2 SNF 2009-11-16 21:48:31: Sf6/O2 nitride etch worked fine Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 16:33:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:33:18 -0800 Subject: Comment drytek2 SNF 2009-11-17 13:54:18: F22 flow was resolved Message-ID: Archived From lindaw at snf.stanford.edu Fri Nov 27 12:44:17 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 27 Nov 2009 12:44:17 -0800 Subject: Problem drytek2 SNF 2009-11-27 12:44:16: left back pin on 3rd platen from top came out Message-ID: I can't find any pliers long enough to put the pin back in. From lindaw at snf.stanford.edu Fri Nov 27 12:45:16 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 27 Nov 2009 12:45:16 -0800 Subject: Comment drytek2 SNF 2009-11-27 12:45:15: Also, all of the flashlights in the lab are dead. Message-ID: batteries please? From shott at snf.stanford.edu Fri Nov 27 12:53:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 27 Nov 2009 12:53:45 -0800 Subject: Problem drytek2 SNF 2009-11-27 12:44:16: left back pin on 3rd platen from top came out Message-ID: Pin replaced ... John From mdickey at snf.stanford.edu Mon Nov 30 09:38:37 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 30 Nov 2009 09:38:37 -0800 Subject: Comment drytek2 SNF 2009-11-27 12:45:15: Also, all of the flashlights in the lab are dead. Message-ID: replaced batteries From eenriquez at snf.stanford.edu Mon Nov 30 10:16:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 10:16:12 -0800 Subject: Problem drytek2 SNF 2009-11-16 09:46:04: plasma went on and off Message-ID: Ran poly etch recipe for 7 min with no problems.