Problem drytek2 SNF 2009-11-07 19:40:35: RF power not stable

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sat Nov 7 19:40:36 PST 2009


Process 2
jump from 400 to 200 during the etching process. Try to bring it back to 400. It stays only 20 to 30 secs and drop again.




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