Problem drytek2 SNF 2009-11-09 17:02:57: Very unstable plasma

king at snf.stanford.edu king at snf.stanford.edu
Mon Nov 9 17:02:58 PST 2009


It doesn't hold a plasma longer than a minute or two, using poly etch process.   If you just need an O2 descum you might be OK.  




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