Comment drytek2 SNF 2009-11-10 08:08:38: Quick request

king at snf.stanford.edu king at snf.stanford.edu
Tue Nov 10 08:08:38 PST 2009


Elmer, if you can get the Process #2 poly etch program (SF6= 117, F22= 51, 400W, 150mT) to stay stable for 20 minutes ( a good test) could you please write down your coil and cap settings in the logbook and also here?  Thanks. 




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